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Title: Coating techniques of metal chambers for remote catalytic chemical vapor deposition applications
Authors: Umemoto, Hironobu
Setoguchi, Shota
Uemura, Hitoshi
Matsumura, Hideki
Journal Title: Journal of Vacuum Science and Technology A
Publisher: American Institute of Physics
Journal Volume: 26
Journal Issue: 2
Start Page: 309
End Page: 311
Issue Date: 2008-02-26
Rights: (c)2008 American Institute of Physics
NDC: 431
ISSN: 15531813 OPAC
DOI: 10.1116/1.2844313   
Journal NCID: AA10635514 OPAC ciniib
Textversion: author
Appears in Collections:05. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Umemoto, Hironobu (梅本, 宏信) (ウメモト, ヒロノブ) -- Setoguchi, Shota -- Uemura, Hitoshi -- Matsumura, Hideki

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