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Title: Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching
Authors: Tanaka, Akira
Katsuno, Hironobu
Journal Title: Japanese Journal of Applied Physics
Publisher: Japan Society of Applied Physics
Journal Volume: 48
Journal Issue: 12
Start Page: 120217-1
End Page: 120217-3
Issue Date: 2009
Rights: Copyright © 2009 The Japan Society of Applied Physics.
NDC: 549
ISSN: 00214922 OPAC
E-ISSN: 13474065 OPAC
Publisher's DOI: 10.1143/JJAP.48.120217   
Journal NCID: AA12295836 OPAC ciniib
Textversion: author
Appears in Collections:21. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Tanaka, Akira (田中, 昭) (タナカ, アキラ) -- Katsuno, Hironobu (勝野, 廣宣) (カツノ, ヒロノブ)

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