Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching

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Title:	Formation of Bare Porous Surface on 6H-SiC Substrates by Photo-Electrochemical Etching
Authors:	Tanaka, Akira Katsuno, Hironobu
Journal Title:	Japanese Journal of Applied Physics
Publisher:	Japan Society of Applied Physics
Journal Volume:	48
Journal Issue:	12
Start Page:	120217-1
End Page:	120217-3
Issue Date:	2009
Rights:	Copyright © 2009 The Japan Society of Applied Physics.
NDC:	549
ISSN:	00214922
E-ISSN:	13474065
DOI:	10.1143/JJAP.48.120217
Journal NCID:	AA12295836
Textversion:	author
Appears in Collections:	21. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Tanaka, Akira (田中, 昭) (タナカ, アキラ) -- Katsuno, Hironobu (勝野, 廣宣) (カツノ, ヒロノブ)