Microstructure and electrical properties of BaTiO3 thin films by modified CSD

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Title:	Microstructure and electrical properties of BaTiO3 thin films by modified CSD
Authors:	Nagasaka, Masaomi Iwasaki, Dai Sakamoto, Naonori Fu, Desheng Wakiya, Naoki Suzuki, Hisao
Journal Title:	Journal of the Ceramic Society of Japan
Publisher:	The Ceramic Society of Japan
Journal Volume:	119
Journal Issue:	1390
Start Page:	498
End Page:	501
Issue Date:	2011-06
Rights:	Copyright (c) 2011 The Ceramic Society of Japan
NDC:	433
Abstract:	0.3 M BaTiO3 (BT) precursor solution was prepared by the modified CSD, in which partially hydrolyzed Ti-alkoxide and Ba precursor solution was reacted in iced water bath to prepare the highly polymerized BT precursor solution. The BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate with and without (100)-oriented LaNiO3 (LNO) thin film electrode. In addition, effect of the pre-annealing at 600°C in O2 atmosphere was elucidated by measuring the electrical properties of the resulting BT thin films deposited by the different annealing process. The results clearly indicated that the 600°C pre-annealing and the LNO thin film electrode are effective to enhance the electrical properties of the resultant BT thin films from the precursor solution by the partial hydrolysis method.
ISSN:	18820743
E-ISSN:	13486535
DOI:	10.2109/jcersj2.119.498
Article NAID:	130000784619
Journal NCID:	AA12229489
Textversion:	publisher
Appears in Collections:	05. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Nagasaka, Masaomi -- Iwasaki, Dai -- Sakamoto, Naonori (坂元, 尚紀) (サカモト, ナオノリ) -- Fu, Desheng (符, 徳勝) (フ, トクショウ) -- Wakiya, Naoki (脇谷, 尚樹) (ワキヤ, ナオキ) -- Suzuki, Hisao (鈴木, 久男) (スズキ, ヒサオ)