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タイトル: Microstructure and electrical properties of BaTiO3 thin films by modified CSD
著者: Nagasaka, Masaomi
Iwasaki, Dai
Sakamoto, Naonori
Fu, Desheng
Wakiya, Naoki
Suzuki, Hisao
掲載誌名: Journal of the Ceramic Society of Japan
出版者: The Ceramic Society of Japan
巻: 119
号: 1390
開始ページ: 498
終了ページ: 501
出版日付: 2011-06
権利: Copyright (c) 2011 The Ceramic Society of Japan
NDC: 433
抄録: 0.3 M BaTiO3 (BT) precursor solution was prepared by the modified CSD, in which partially hydrolyzed Ti-alkoxide and Ba precursor solution was reacted in iced water bath to prepare the highly polymerized BT precursor solution. The BT precursor solution was spin-coated on a Pt/Ti/SiO2/Si substrate with and without (100)-oriented LaNiO3 (LNO) thin film electrode. In addition, effect of the pre-annealing at 600°C in O2 atmosphere was elucidated by measuring the electrical properties of the resulting BT thin films deposited by the different annealing process. The results clearly indicated that the 600°C pre-annealing and the LNO thin film electrode are effective to enhance the electrical properties of the resultant BT thin films from the precursor solution by the partial hydrolysis method.
ISSN: 18820743 OPAC
E-ISSN: 13486535 OPAC
出版者DOI: 10.2109/jcersj2.119.498   
NII論文ID: 130000784619 ciniia
NII書誌ID: AA12229489 OPAC ciniib
バージョン: publisher
出現コレクション:05. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Nagasaka, Masaomi -- Iwasaki, Dai -- Sakamoto, Naonori (坂元, 尚紀) (サカモト, ナオノリ) -- Fu, Desheng (符, 徳勝) (フ, トクショウ) -- Wakiya, Naoki (脇谷, 尚樹) (ワキヤ, ナオキ) -- Suzuki, Hisao (鈴木, 久男) (スズキ, ヒサオ)



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