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SURE: Shizuoka University REpository >
05. 工学部・工学研究科 = Faculty of Engineering >
05. 雑誌論文・記事(Journal Article, Article, Preprint) >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/10297/6167
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| Title: | Nanometer-Scale Deposition of Metal Plating Using a Nanopipette Probe in Liquid Condition |
| Authors: | Ito, So Iwata, Futoshi |
| Journal Title: | Japanese Journal of Applied Physics |
| Publisher: | Japan Society of Applied Physics |
| Journal Volume: | 50 |
| Journal Issue: | 8 |
| Start Page: | 08LB15 |
| Issue Date: | 2011-08-22 |
| Rights: | © 2011 The Japan Society of Applied Physics |
| NDC: | 549 |
| Abstract: | We describe a novel technique of a local metal plating using an atomic force microscope (AFM) with a nanopipette probe in liquid condition. A glass nanopipette, filled with CuSO4 electrolyte solution, was used as the AFM probe. An electrode wire inside the electrolyte-filled nanopipette and the conductive surface of a Au-sputtered glass slide were employed as the anode and the cathode, respectively. To avoid drying of the nanopipette solution and clogging of the probe-edge aperture, the edge of the nanopipette was immersed in the same electrolyte solution in a liquid cell placed on the Au substrate. As for controlling the distance between the probe edge and the surface in the liquid, the nanopipette probe glued on a tuning fork quartz crystal resonator was vertically oscillated to use a method of frequency modulation in tapping-mode. By utilizing the probe–surface distance control during the deposition, nanometer-scale Cu dots were successfully deposited on the Au surfaces without diffusion of the deposition even in the liquid condition. This technique of local deposition in a liquid would be applicable for various fields such as the fabrication of micro/nanometer-scale devices and the arrangement of biological samples. |
| ISSN: | 00214922  |
| E-ISSN: | 13474065  |
| DOI: | 10.1143/JJAP.50.08LB15 |
| Journal NCID: | AA12295836  |
| LINK: | http://jjap.jsap.jp/link?JJAP/50/08LB15/ |
| Textversion: | author |
| Appears in Collections: | 05. 雑誌論文・記事(Journal Article, Article, Preprint)
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