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Title: Catalytic Decomposition of PH_3 on Heated Tungsten Wire Surfaces
Authors: Umemoto, Hironobu
Nishihara, Yushin
Ishikawa, Takuma
Yamamoto, Shingo
Journal Title: Japanese Journal of Applied Physics
Publisher: Japan Society of Applied Physics
Journal Volume: 51
Start Page: 086501
Issue Date: 2012-07-13
Rights: Copyright © 2012 The Japan Society of Applied Physics
NDC: 431
ISSN: 00214922 OPAC
E-ISSN: 13474065 OPAC
Publisher's DOI: 10.1143/JJAP.51.086501   
Journal NCID: AA12295836 OPAC ciniib
Textversion: author
Appears in Collections:05. 雑誌論文・記事(Journal Article, Article, Preprint)

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Others By: Umemoto, Hironobu (梅本, 宏信) (ウメモト, ヒロノブ) -- Nishihara, Yushin -- Ishikawa, Takuma -- Yamamoto, Shingo

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