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Title:	Catalytic Decomposition of PH_3 on Heated Tungsten Wire Surfaces
Authors:	Umemoto, Hironobu Nishihara, Yushin Ishikawa, Takuma Yamamoto, Shingo
Journal Title:	Japanese Journal of Applied Physics
Publisher:	Japan Society of Applied Physics
Journal Volume:	51
Start Page:	086501
Issue Date:	2012-07-13
Rights:	Copyright © 2012 The Japan Society of Applied Physics
NDC:	431
ISSN:	00214922
E-ISSN:	13474065
DOI:	10.1143/JJAP.51.086501
Journal NCID:	AA12295836
LINK:	http://jjap.jsap.jp/link?JJAP/51/086501/
Textversion:	author
Appears in Collections:	05. 雑誌論文・記事(Journal Article, Article, Preprint)

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